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In the manufacturing of La0.2Sr0.8MnO3 (LSMO)-based oxide superconductor films, the thickness of the precursor oxide film is one of the key factors that affect the subsequent deposition of the oxide film. The deposition rate of the films is proportional to the concentration of the precursor ions and the thickness of the films is determined by the initial supply of precursor ions. The stoichiometric composition of the La-Sr-Mn-O (LSMO) precursor film is La0.5Sr0.5MnO3 (LSMO) and the ionic state of the precursor film is in the form of La0.5+3Sr0.5+4Mn5+2O3+nH2O (LSMOH2O), where n is a number between 0 and 3. When the chemical reaction is terminated by drying, the n is increased by 0.5, and the film thickness becomes 0.5 times that of the precursor film. Thus, the correct doping and thickness of the precursor film during the deposition is important for the growth of a high-quality oxide film. In this study, a general relationship between the thickness of the precursor film and the thickness of the resulting oxide film was obtained by measurement and model calculations based on the diffusion-reaction-deposition (DRD) model. The thickness of the precursor film determined by measuring the total thickness of the oxide film and precursor film was 0.4 μm for the LSMOH2O precursor film at a deposition temperature of 450°C, and it was predicted using the developed DRD model. The thickness of the LSMOH2O oxide films obtained from the DRD model was consistent with the measured results, and this model was effective for predicting the optimum thickness of the LSMOH2O precursor film during the growth of the oxide film.
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